MASTER DISK FOR MANUFACTURING SUBSTRATE FOR INFORMATION RECORDING MEDIUM AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a master disk which is capable of exactly forming sharp exposure patterns even with exposure light of a short wavelength and a method for manufacturing the same. SOLUTION: The master disk for manufacturing a substrate for information recording media is manufactured. A photoresist is applied onto a smooth glass substrate. The glass plate and the photoresist are so selected as to satisfy|ng-nr|<=0.1 when the refractive indices of the glass plate and photoresist at the wavelength of the light used for the exposure of the photoresist are respectively defined as ng and nr. The multiple reflections of the exposure light at the boundary between the glass plate and the photoresist are prevented and the sharp and fine exposure patterns may be surely formed.