| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for analyzing a very small amount of gas which enables to perform accurate detecting by removing memory effect. SOLUTION: In the apparatus for analyzing a very small amount of gas including at least a diffusion scrubber 11 for collecting a gas component in the atmosphere and a sampling pipe 10 for introducing the atmosphere into the diffusion scrubber 11, a washing means 2 for washing the diffusion scrubber 11 and the sampling pipe 10 using a washing liquid 22 is provided.
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