| 摘要 |
PROBLEM TO BE SOLVED: To rotatively drive a high weight raw material rod of >=4 kg at a high speed of 15,000 rpm, to improve the productive efficiency of high quality powder and to facilitate and ensure the exchange of gas in a vacuum vessel. SOLUTION: This system is provided with a cylindrical member 3 passing through a vacuum vessel 2, a bearing 5 and a spindle 4 located at the inside thereof, a fluid seal 6 sealing the space between the cylindrical member 3 and the edge part in the vessel 2 of the spindle 4, and a raw material holder 7 bonded to the tip in the vessel 2 of the spindle 4 and an electric motor 11 rotatively driving the spindle 4 at a high speed. A motor rotary shaft 18 thereof is connected with outer rear end part of the vessel 2 of the spindle 4, a motor frame 29 is supported by the rear end part of the cylindrical member 3 via a supporting leg 25. An airtight opening/closing device 10 is located around the circumferential face of the raw material holder 7, and a vacuum opening/closing cover 8 is placed on an airtight position at the time of evacuation for the vessel 2 and is placed on an opening position at the time of high speed rotation for powder production. The inner direction of the cylindrical member 3 is provided with a cooling water passage 13, lubricating oil passages 12a and 12b and cooling air passage 16 and 17.
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