| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of restricting transmission of vibration to an external container without using a damper. SOLUTION: This vacuum pump is provided with an outer cylinder part 16, a rotor part 14 and a stator part 18 contained in the outer cylinder part 16 for forming a carrying part for gas taken in from an intake port 38, a magnetic bearing 20 for supporting the rotor part 14 to the stator part 18, a motor 21 for rotating the rotor part 14 to the stator part 18, and a base 19 for supporting the outer cylinder part 16 and the stator part 18, and a vibration absorption member 50 having a natural frequency F=(f1+f3)/2±(f1-f3)/4 is disposed between the stator part 18 and the base 19, where f1 is the natural frequency of nutation of the rotor part 14 rotated at a rated rotation number in the conical mode, f2 is its natural frequency in the parallel mode, and f3 is the natural frequency of its precession in the conical mode.
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