发明名称 METHOD OF MANUFACTURING FOR SEMICONDUCTOR LASER LIGHT EMITTING DEVICE
摘要 PROBLEM TO BE SOLVED: To achieve working with high precision by canceling a surface step-difference of a laminated film which is formed so as to cover a first semiconductor laser light emitting element and turned into a second semiconductor laser light emitting element, when a semiconductor laser light emitting device oscillating two wavelengths is manufactured. SOLUTION: In this manufacturing method of the semiconductor laser light emitting device 1, the first and the second semiconductor laser light emitting elements 3, 5 which oscillate laser lights of different wavelengths are formed on a substrate 10. A first laminate 17 in which ternary based compound semiconductors are laminated is formed in a forming region 11 of the first semiconductor laser light emitting element on the substrate 10, and a second laminate 27 which covers the first laminate 17 and composed of quaternary based compound semiconductors is formed on the substrate 10. After that, a surface of the second laminate 27 is so flattened that a surface of the first laminate 17 is exposed, and ridge type current injection regions 32, 33 are formed on a clad layer. A current constriction region 34 is formed, the first laminate 17 and the second laminate 27 are separated, and a space 35 is formed between the laminates.
申请公布号 JP2001244569(A) 申请公布日期 2001.09.07
申请号 JP20000055403 申请日期 2000.03.01
申请人 SONY CORP 发明人 NARUI HIRONOBU
分类号 H01S5/22;H01S5/40;(IPC1-7):H01S5/22 主分类号 H01S5/22
代理机构 代理人
主权项
地址