| 摘要 |
PROBLEM TO BE SOLVED: To effectively cool a valve plate 5 and to prevent the thermal deterioration of a sealing material 7 by preventing the sealing material 7 from being heated through the valve plate 5 with a simple and inexpensive structure in a vacuum gate valve having the valve plate 5 for opening and closing a front opening 2 of the valve casing 1 communicated to a vacuum container C1, and sealing a clearance between the valve plate 5 and a front wall 1a inner face around the opening 2 by the sealing material 7 in a closed state of the valve plate 5. SOLUTION: A heat conducting member 61 abutted to the front wall 1a inner face of the valve casing 1 in a closed state to heat conductably connecting the valve plate 5 and the front wall 1a of the valve casing 1, is mounted on an outer peripheral edge part of the valve plate 5, and the valve plate 5 is cooled by both of the radiation and the heat conduction to the front wall 1a of the valve casing 1.
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