发明名称 |
TRANSISTER DEVICES WITH TAPERED SUSPENDED VERTICAL ARRAYS OF CARBON NANOTUBES |
摘要 |
A transistor device includes an array of fin structures arranged on a substrate, each of the fin structures being vertically alternating stacks of a first isoelectric point material having a first isoelectric point and a second isoelectric point material having a second isoelectric point that is different than the first isoelectric point; one or more carbon nanotubes (CNTs) suspended between the fin structures and contacting a side surface of the second isoelectric point material in the fin structures; a gate wrapped around the array of CNTs; and source and drain contacts arranged over the fin structures; wherein each of the fin structures have a trapezoid shape or parallel sides that are oriented about 90° with respect to the substrate. |
申请公布号 |
US2016293871(A1) |
申请公布日期 |
2016.10.06 |
申请号 |
US201514674339 |
申请日期 |
2015.03.31 |
申请人 |
International Business Machines Corporation |
发明人 |
Cao Qing;Cheng Kangguo;Li Zhengwen;Liu Fei;Zhang Zhen |
分类号 |
H01L51/05;H01L51/00 |
主分类号 |
H01L51/05 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Armonk NY US |