METHOD FOR MANUFACTURING INK JET PRINT HEAD HAVING HEMISPHERICAL INK CHAMBER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink jet print head having a hemispherical ink chamber. SOLUTION: A nozzle plate is formed on a substrate surface. An annular heater and an electrode are formed on the nozzle plate. A manifold is formed by etching the substrate. A nozzle is formed inside the heater by etching the nozzle plate. A groove for forming an ink channel is formed by etching the nozzle plate from the outside of the heater to the manifold side. The hemispherical ink chamber is formed by etching the substrate exposed by the nozzle. The ink channel which connects the ink chamber to the manifold is formed by isotropically etching the substrate exposed by the groove for forming the ink channel. The groove for forming the ink channel is blocked by forming a first material film on the nozzle plate. The first material film prevents the ink from leaking through the groove for forming the ink channel.