FABRICATING METHOD FOR COLD CATHODE DEVICE AND COLD CATHODE

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of improving electron emission efficiency from a cold cathode. SOLUTION: In the fabricating method for the cold cathode device having a field emission cold cathode comprising a cathodic bus bar formed on a substrate and silicon electrically connected to the cathodic bus bar and a gate electrode arranged away from the electron emission cold cathode, a process is provided of adding an n-type impurity in an electron emitting area of the field emission cold cathode.