Multiple local probe measuring device and method

摘要

A local probe measuring device is provided for effecting local measurements of a sample. This device includes first and second local probes for local measurements with respect to a sample or a reference surface. A measurement condition adjustment arrangement is adapted to commonly adjust first and second measurement conditions of the respective first and second local probes with respect to the sample or the reference surface. A detection arrangement is provided that includes first and second detection arrangements associated with the respective first and second local probes and adapted to independently detect first and second measurement data referring to local measurements effected by the respective first and second local probes.