PIEZOELECTRIC THIN FILM RESONATOR AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A piezoelectric thin film resonator and a fabrication method thereof are provided to increase a production yield through an easy fabrication process. CONSTITUTION: According to the piezoelectric thin film resonator, a bottom electrode(10) is formed in a fixed pattern on a substrate(2). A top electrode pad part(14) is formed on the same substrate as the above bottom electrode so that it is not disconnected each other. A piezoelectric thin film(20) is formed on a part of the top electrode pad part and on the bottom electrode. A top electrode(30) is formed on the above piezoelectric thin film. And a connection part(32) is formed by being prolonged projectedly toward the top electrode from the top electrode in a body and connects the top electrode pad part and the top electrode.