| 摘要 |
PURPOSE: A biaxial driving actuator is provided to lower a driving voltage and reduce the power consumption by performing a biaxial driving operation without using an additional actuator. CONSTITUTION: A couple of trenches(3,3') are formed on a substrate(1). A support plate(13) is rotated by using the first rotary axis(10) as a center axis at an upper portion of the substrate. A micro mirror(20) is rotated by using the second rotary axis(17) as the center axis on a different layer from the support plate. One ore more electrodes are used for generating the electrostatic force by the interaction with the support plate or the micro mirror. The electrodes are formed with a bottom electrode and a side electrode which are formed at a bottom portion and a side portion of the trenches.
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