| 摘要 |
PURPOSE: A semiconductor equipment system is provided to monitor a state of a corresponding main unit and control the corresponding main unit by making a selection unit select the first control unit according to its own function of a distributor when the selection unit is controlled by a monitoring unit. CONSTITUTION: Main units(10,20,30) perform semiconductor processes. The first, second and third control units(11,13,15,21,23,25,31,33,35) control the main units. A plurality of the control units are allotted to the main units, respectively. The selection unit(60) selects one of the first control units, connected to the first control units of each main unit. The monitoring unit(70) monitors and controls the main unit corresponding to the selected first control unit.
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