发明名称 CONTROL METHOD FOR SCANNING PROBE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a control method for a scanning probe microscope having higher operability by utilizing a tab window technology. SOLUTION: When an operator selects a STM mode, a control part 2 recognizes a measurement in the STM mode, and sets the preset values to setting items. After the operator selects a measurement condition, the operator measures all parameters on a control panel with the preset values, or modifies displayed preset values. The operator then clicks a [Scan] button on the control panel using a mouse 4. The control part 2 controls a scanning probe microscope 1 and an external device 6 according to the values modified by the operator and the preset values of the parameters for the STM which are pre-stored. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003240698(A) 申请公布日期 2003.08.27
申请号 JP20020043318 申请日期 2002.02.20
申请人 JEOL LTD 发明人 YONEI KAZUNORI
分类号 G01B21/30;G01Q30/00;G01Q60/10;G01Q60/24;G01Q60/26;G01Q90/00;(IPC1-7):G01N13/10;G01N13/12;G01N13/16 主分类号 G01B21/30
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