| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for quantitative measurement of membrane properties such as thickness, density, or modulus of rigidity. SOLUTION: This device comprises quartz resonator 2 on which a membrane to be measured is formed, a resonance circuit 7 applying a certain voltage to the quartz resonator 2 to resonate, a frequency indicator 8 measuring a resonance frequency of the quartz resonator 2, an impedance analyzer 9 measuring an impedance of the quartz resonator 2, and a calculator 10 analyzing the measured resonance frequency and impedance of the quartz resonator 2 using an electrically equivalent circuit having a multi-layer membrane structure, and calculating thickness, density, or modulus of rigidity of the membrane to be measured 1. COPYRIGHT: (C)2003,JPO
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