| 发明名称 |
System for conveying liquids without pulsing |
| 摘要 |
A system tot the pulsation-free delivery of liquids, which system may be used for high-purity, liquid chemicals in the semiconductor industry.
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| 申请公布号 |
US6623248(B1) |
申请公布日期 |
2003.09.23 |
| 申请号 |
US20010857692 |
申请日期 |
2001.06.08 |
| 申请人 |
MERCK PATENT GMBH |
发明人 |
DUSEMUND CLAUS;FREISSLER KLAUS;JAMMER WILFRIED;POTH MICHAEL;DIX ALBERTO;TEMPEL EBERHARD |
| 分类号 |
F04B11/00;F04B9/129;F17D1/12;H01L21/02;(IPC1-7):F04F1/06;F04F3/00 |
主分类号 |
F04B11/00 |
| 代理机构 |
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