| 摘要 |
PROBLEM TO BE SOLVED: To provide an aspherical-shape measuring machine by which both errors in a reference sphere as a reference and a probe tip sphere are separated and measured. SOLUTION: The aspherical-shape measuring machine is constituted to be provided with a rotation holding mechanism 5, around center axis the probe tip sphere 8, its position detection means, and the like. The measuring machine is provided with a rotation holding mechanism 7 orthogonal axis around which is at right angles to a center axis line of the holding mechanism 5 so as to be turned and held, and a shape calculation means by which spherical shape data by the position detection beams before and after a rotation by the holding mechanism 7 is integrated by its phase difference so as to calculate coordinates on the surface of a measuring object sphere. COPYRIGHT: (C)2004,JPO
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