| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism for cooling an electron beam irradiation window which increases the flow rate of a gas flowing on a surface to be cooled beyond the feed rate of the gas and can cool the surface to be cooled efficiently when the electron beam irradiation window is cooled. SOLUTION: The mechanism for cooling the electron beam irradiation window 11 cools an irradiation window 11 in an electron beam irradiator that has a head part 12 with an irradiation window made of a material transmitting an electron beam and an electron beam generation part 13. The mechanism is so constituted that a cooling wind blowing-off part 17 which is located at the same level as or slightly higher or lower than that of a surface of the irradiation window to be cooled and is composed so that cooling wind can be blown parallel to the surface to be cooled is placed in a part of the outer peripheral part 18 and also has an inclined plane 20 where the diameter of a wall face perpendicular to the surface to be cooled enlarges outward from an air outlet 19 near the cooling wind blowing-off part 17. Then, the mechanism is so constituted that the cooling wind fed from the cooling wind blowing-off part 17 can be blown while entraining a gas around the cooling wind blowing-off part 17 from the inclined plane 20. COPYRIGHT: (C)2004,JPO
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