| 摘要 |
A microelectromechanical (MEM) actuator incorporates a dual-stator design operated electrostatically in conjunction with a rotor to affect a fine positioning of a thin film magnetic read/write head. The substantial gain in the frequency response bandwidth greatly improves the performance and accuracy of the track-follow control for fine positioning of the thin film read/write head. The stators are comprised of a plurality of electrodes arranged perpendicularly along a plurality of stationary radial spokes, which are interleaving and oppositely disposed to the same plurality of moveable radial spokes formed on the rotor. A track-follow control commands a voltage to be supplied to the rotor and stators, thereby inducing an electrical potential field to generate an electrostatically attractive force for each pair of radial spokes between each of the stator and the rotor. These circumferentially acting forces result in a torque that causes the rotor on which the slider is mounted to displace in a pure clockwise or counterclockwise rotation about the center of the flexure.
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