发明名称 |
Index guided vertical cavity surface emitting lasers |
摘要 |
Planar index guided vertical cavity surface emitting laser (PIG VCSEL) utilizes index guiding to provide improved optical confinement and proton implantation to improve current confinement. Index guiding is achieved by etching index guide openings (holes or partial ridges) around the optical confinement region and may be adjusted by varying the etched volume of the index guide openings (holes and partial ridges). The top contact surface area is increased in the PIG VCSEL thereby lowering contact and device resistance to improve VCSEL performance further. The PIG VCSEL is a substantially planarized device for ease of manufacture.
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申请公布号 |
US6822993(B2) |
申请公布日期 |
2004.11.23 |
申请号 |
US20030338137 |
申请日期 |
2003.01.08 |
申请人 |
JDS UNIPHASE CORPORATION |
发明人 |
LEE HSING-CHUNG;CHUI LIEW-CHUANG |
分类号 |
H01S5/183;H01S5/20;(IPC1-7):H01S5/00 |
主分类号 |
H01S5/183 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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