OPTICAL WAVEGUIDE SUBSTRATE, OPTICAL WAVEGUIDE, MANUFACTURING APPARATUS FOR OPTICAL WAVEGUIDE SUBSTRATE AND METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a square optical waveguide substrate by forming a fine pattern of the core part of the optical waveguide by a glass molding method without a post treatment by machining in order to easily mass produce optical waveguides having low loss and high reliability at a low cost. SOLUTION: An optical waveguide is manufactured by using an optical waveguide substrate. The optical waveguide substrate has a groove 14 for the core part of the optical waveguide on the surface and has a protruding part 15 in a part of the side face in the height direction or in the perimeter direction, and is manufactured by heating and pressurizing a glass substrate 11 with a pair of molds consisting of an upper mold and a lower mold. COPYRIGHT: (C)2005,JPO&NCIPI