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发明名称
半导体或液晶制造装置用之固持体及装载其之半导体或液晶制造装置
摘要
本发明揭示一种半导体或液晶制造装置的固持体,及其中装载该固持体之半导体制造装置,其中可以增进在含有电阻加热元件之陶瓷收纳器之该处理物体保持表面的温度均匀性。藉由在一含有陶瓷收纳器之电阻加热元件之相对于其处理物体保持侧之侧上配置一金属板,被保持在该收纳器上的一半导体晶圆或LCD玻璃之表面温度即可维持均匀。虽然仅设置该金属板在该陶瓷收纳器上即为有效,将其由焊接、螺旋、合身固接或真空黏着可进一步增进其效用。
申请公布号
TW200428892
申请公布日期
2004.12.16
申请号
TW093104443
申请日期
2004.02.23
申请人
住友电气工业股份有限公司
发明人
柊平启;夏原益宏;仲田博彦
分类号
H05B3/10
主分类号
H05B3/10
代理机构
代理人
陈长文
主权项
地址
日本
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