发明名称 LASER MACHINING METHOD
摘要 <p>A laser machining method for machining a workpiece by applying a laser beam thereto, comprises a protective film coating step of coating a surface to be machined, of the workpiece with a protective film; a laser beam shining step of applying a laser beam to the workpiece through the protective film; and a protective film removal step of removing the protective film after completion of the laser beam shining step.</p>
申请公布号 SG111172(A1) 申请公布日期 2005.05.30
申请号 SG20030006931 申请日期 2003.11.27
申请人 DISCO CORPORATION 发明人 KAZUMA SEKIYA
分类号 B23K26/18;B23K26/00;B23K26/03;B23K26/08;B23K26/38;B23K26/40;B23K101/40;H01L21/301;H01L21/68;H01L21/78;(IPC1-7):H01L21/31;H01L21/30;H01L21/302;H01L21/027;H01L21/00;H01L21/02 主分类号 B23K26/18
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