Stripe-Shaped Electrode Structure Including a Main Portion with a Field Electrode and an End Portion Terminating the Electrode Structure

摘要

A semiconductor device includes a stripe-shaped electrode structure that extends from a first surface into a semiconductor portion. The electrode structure includes a main portion and an end portion terminating the electrode structure. The main portion includes a field electrode and a first portion of a field dielectric separating the field electrode from the semiconductor portion. The end portion includes a filled section in which a second portion of the field dielectric extends from a first side of the electrode structure to an opposite second side. The filled section is narrower than the main portion and a length of the filled section along a longitudinal axis of the electrode structure is at least 150% of a first layer thickness of the first portion of the field dielectric.

主权项

1. A semiconductor device, comprising:
a stripe-shaped electrode structure extending from a first surface into a semiconductor portion, wherein the electrode structure comprises a main portion and an end portion terminating the electrode structure, wherein the main portion comprises a field electrode and a first portion of a field dielectric separating the field electrode from the semiconductor portion, wherein the end portion comprises a filled section in which a second portion of the field dielectric extends from a first side of the electrode structure to an opposite second side, wherein the filled section is narrower than the main portion and a length of the filled section along a longitudinal axis of the electrode structure is at least 150% of a first layer thickness of the first portion of the field dielectric.