METHOD AND APPARATUS FOR DISPOSAL OF HYDROGEN FROM FLUORINE GENERATION, AND FLUORINE GENERATOR EQUIPPED WITH THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method used for disposal of hydrogen from a fluorine generation tank.

SOLUTION: In one embodiment, the apparatus is equipped with an aerosol reduction unit and a catalytic combustion unit. The catalyst in the catalytic combustion unit is maintained at a temperature needing no pilot light nor electric spark device. Explanation is given to the fluorine generator equipped with the aerosol reduction unit and catalytic unit, and to the generation method.

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