| 发明名称 |
VACUUM PUMP AND MASS SPECTROMETER |
| 摘要 |
A vacuum pump comprises: a first pump stage; a second pump stage provided downstream of the first pump stage; a first suction port provided on a suction side of the first pump stage; and a second suction port provided downstream of the first pump stage and communicating with the second pump stage. The first pump stage includes a siegbahn pump portion suitable for a small exhaust volume, and a turbo-molecular pump portion. The second pump stage includes a Holweck pump portion suitable for a great exhaust volume. |
| 申请公布号 |
US2016365234(A1) |
申请公布日期 |
2016.12.15 |
| 申请号 |
US201615145895 |
申请日期 |
2016.05.04 |
| 申请人 |
Shimadzu Corporation |
发明人 |
MANABE Masashi |
| 分类号 |
H01J49/24;F04D25/16 |
主分类号 |
H01J49/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vacuum pump comprising:
a first pump stage; a second pump stage provided downstream of the first pump stage; a first suction port provided on a suction side of the first pump stage; and a second suction port provided downstream of the first pump stage and communicating with the second pump stage, wherein the first pump stage includes a siegbahn pump portion suitable for a small exhaust volume, and a turbo-molecular pump portion, and the second pump stage includes a Holweck pump portion suitable for a great exhaust volume. |
| 地址 |
Kyoto JP |
