METHOD FOR INSPECTING CUTTING BLADE

摘要

A method of inspecting a cutting blade having a cutting edge formed of abrasive grains of selected abrasive grain diameters which are bound by a bonding material, includes a cutting step of moving the chuck table and the cutting blade, which is being rotated at a high speed, relatively to each other along a direction perpendicular to an axis of rotation of a spindle, thereby forming a cut groove in the workpiece, and an inspecting step of capturing an image of the cut groove formed in the workpiece by image capturing means, and inspecting the state of the cut groove. The inspecting step examines whether or not the selected abrasive grain diameters are proper on the basis of any of the elements representing the size of an average chip, the number of chips, and the area of chips on both sides of the cut groove per unit length.

主权项

1. A method of inspecting a cutting blade having a cutting edge formed of abrasive grains of selected abrasive grain diameters which are bound by a bonding material, the method comprising:
a holding step of holding a workpiece on a chuck table; an installing step of installing the cutting blade on a tip end of a spindle having an axis of rotation along a first direction; a cutting step of moving the chuck table and the cutting blade, which is being rotated at a high speed, relatively to each other along a second direction perpendicular to the first direction, thereby forming a cut groove in the workpiece; and an inspecting step of capturing an image of the cut groove formed in the workpiece by image capturing means, and inspecting the state of the cut groove; wherein the inspecting step examines whether or not the selected abrasive grain diameters are proper on the basis of any of the elements representing the size of an average chip, the number of chips, and the area of chips on both sides of the cut groove per unit length.