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发明名称
IRRADIATION APPARATUS AND METHODS
摘要
申请公布号
GB1488741(A)
申请公布日期
1977.10.12
申请号
GB19750015319
申请日期
1975.04.14
申请人
WESTERN ELECTRIC CO INC
发明人
分类号
H05K3/00;H01J37/304;H01L21/027;(IPC1-7):G05D3/00;G05B15/02
主分类号
H05K3/00
代理机构
代理人
主权项
地址
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