发明名称 UNDISTURRED MIRROR SURFACE POLISHING METHOD OF CRYSTAL
摘要 PURPOSE:To effectively and economically obtain the smooth mirror surface, corresponding to the epitaxial growth ground etc., having no processing defect, by polishing the crystal material to ge polished with the abrasive, added electrolyte, in order to promote the gelling relocity of colloidal solution, containing super minute grinding particles.
申请公布号 JPS52150789(A) 申请公布日期 1977.12.14
申请号 JP19760067726 申请日期 1976.06.11
申请人 发明人
分类号 C09K3/14;B24B37/00;B24B37/12;C30B33/10;H01L21/20;H01L21/205;H01L21/304 主分类号 C09K3/14
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