ELECTROMECHANICAL SYSTEMS DEVICE WITH HINGES FOR REDUCING TILT INSTABILITY

摘要

This disclosure provides systems, methods, and apparatus for reducing tilt instability in an electromechanical systems (EMS) device, where the EMS device includes a plurality of hinges supporting a movable mirror over a stationary electrode and having identical hinge lengths. The EMS device can include a plurality of first anchor points providing connection at the substrate and a plurality of second anchor points providing connection at the movable mirror. Each of the hinges can be positioned between paired first and second anchor points and symmetrically arranged about the center of the movable mirror. In some implementations, the plurality of first anchor points and the plurality of second anchor points can be defined by a single mask.

主权项

1. An electromechanical systems (EMS) device comprising:
a substrate; a stationary electrode on the substrate; a movable mirror over the stationary electrode and configured to move across a first gap by electrostatic actuation between the movable mirror and the stationary electrode; a plurality of first anchor points equally spaced apart and arranged about the center of the movable mirror, the first anchor points providing connection of the EMS device at the substrate; a plurality of second anchor points equally spaced apart and arranged about the center of the movable mirror, the second anchor points providing connection of the EMS device at the movable mirror, each of the first anchor points corresponding to at least one of the second anchor points to define a plurality of paired first and second anchor points; and a plurality of hinges, each positioned between a distinct one of the plurality of paired first and second anchor points, the plurality of hinges connected to the movable mirror and symmetrically arranged about the center of the EMS device, wherein the movable mirror has a front surface facing the substrate and a back surface opposite the front surface, the plurality of hinges suspended over and connected to the back surface of the movable mirror at the plurality of second anchor points.