VERTICAL OUTPUT COUPLERS FOR PHOTONIC DEVICES

摘要

A method forms a vertical output coupler for a waveguide that propagates light along a horizontal propagation direction, through a waveguide material that overlies a buried oxide layer. The method includes etching the waveguide to remove a portion of the waveguide. The etching forms at least a first plane that is at an edge of the waveguide, is adjacent to the removed portion of the waveguide, and is tilted at a vertical angle between 20 degrees and 70 degrees with respect to the propagation direction. The method further includes coating the first tilted plane with a reflective metal to form a mirror, such that the mirror reflects the light into a direction having a vertical component.

主权项

1. A method of forming a vertical output coupler for a waveguide that propagates light, along a horizontal propagation direction, through a waveguide material that overlies a buried oxide layer, the method comprising:
etching the waveguide material to form the waveguide; etching the waveguide material to remove at least a first portion of the waveguide, wherein the etching forms:
at least a first tilted plane in the waveguide material, anda space between an unetched portion of the waveguide and the first tilted plane; coating the first tilted plane with a reflective metal to form a tilted mirror; and depositing an index matching material into the space between the unetched portion of the waveguide and the tilted mirror so that light propagating through the waveguide into the space continues through the index matching material to the tilted mirror, and the tilted mirror reflects the light upwardly.