| 摘要 |
PURPOSE:To prevent positively a processing tank from intrusion of other liquid in a device for applying voltage between an electrode and workpiece in a processing liquid tank for processing by selectively using processing liquid suited for processing requirements and cleaning the processing tank with cleaning liquid in the exchange of the processing liquid. CONSTITUTION:After the completion of rough and intermediate processes, a switch valve 30a is fully opened to recover first processing liquid in a processing tank 10 to a processing liquid tank 12a through a liquid returning path 20a. Next, switch valves 30a, 30b are closed to operate a cleaning liquid supply unit 24 for opening a liquid supplying path 28 and filling the processing tank 10 with cleaning liquid through a liquid pressure adjusting valve unit 26 while producing convection and stirring in the cleaning liquid. After removal of reside of the first processing liquid by cleaning, a switch valve 32 is fully opened to recover the cleaning liquid in the processing tank 10 to a cleaning tank 22. In the next finishing process is operated a processing liquid supply unit 14b for a processing liquid tank 12b storing second processing liquid to supply the second processing liquid to the processing tank 10 until the tank 10 is filled with the second processing tank for finishing process. After the completion of the finishing process, the switch valve 30b is opened to recover the second processing liquid in the processing tank 10 to the processing liquid tank 12b for completing the whole processes. |
