| 摘要 |
PURPOSE:To obtain a device capable of manufacturing a photosensitive body optional in size by providing it with 2 columnar shafts rotatably supported in parallel on the base of a vacuum evaporation deposition vessel and a mechanism for transmitting rotation of the shafts to the support of the substrate of the photosensitive body. CONSTITUTION:A columnar support 12 winding a sheet substrate 11 has flanges 13 on both ends, and the end of each flange 13 is fitted into each of annular grooves 15 formed on both sides of 2 rotary shafts 14 controlled in temp. When both shafts 14 are rotated in the arrow direction in a vacuum vessel, the support 12 of the substrate 11 is also rotated in the direction of the upper arrow, and a vapor-deposited film is formed on the surface of the substrate 11 with Se vapor produced from a heated evaporation source 4. The substrate 11 is rotated by rotation of the shafts 14 by the medium of the friction force between the grooves 15 and the flanges 13, and at that time, the attached evaporation material has a danger of scattering as powder due to said friction and forming defects on the surface of the photosensitive body, but they are prevented by enlarging the diameter of each flange 13. |
