Three-port microvalve with improved sealing mechanism

摘要

A microvalve includes a first plate having an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region. A first sealing structure extends about the normally open fluid port, and a second sealing structure extends about the normally closed fluid port. A second plate defines a non-movable portion and a movable portion. A surface of the non-movable portion abuts the inner surface of the first plate, the non-movable portion having an opening formed therethrough. The movable portion is formed within the opening, has an axis, and defines a displaceable member connected to the non-movable portion by a convoluted spring formed in the opening. The displaceable member is slidingly and axially movable within the opening between a first position, wherein the displaceable member cooperates with the second sealing structure to prevent fluid communication through the normally closed fluid port, and a second position, wherein the displaceable member does not cooperate with at least a portion of the second sealing structure to prevent fluid communication through the normally closed fluid port.

主权项

1. A microvalve comprising:
a first plate including an inner surface, a recessed region provided within the inner surface, a normally open fluid port and a normally closed fluid port provided within the recessed region, a first sealing structure extending from a bottom surface of the recessed region and about the normally open fluid port, and a second sealing structure extending from the bottom surface of the recessed region and about the normally closed fluid port, wherein a portion of the recessed region extends between the first sealing structure and the second sealing structure; and a second plate defining a non-movable portion and a movable portion, a surface of the non-movable portion abutting the inner surface of the first plate, the non-movable portion having an opening formed therethrough, the movable portion formed within the opening and having an axis, the movable portion defining a displaceable member connected to the non-movable portion by a convoluted spring formed in the opening, the displaceable member slidingly and axially movable within the opening between a first position, wherein the displaceable member substantially blocks the normally closed fluid port, and a second position, wherein the displaceable member does not substantially block the normally closed fluid port.