发明名称 |
METHODS AND APPARATUS FOR IMPROVED METAL ION FILTERING |
摘要 |
Methods and apparatus for improved metal ion filtering are provided herein. In some embodiments, a substrate processing apparatus includes: a chamber body and a chamber lid disposed on the chamber body defining a processing region within the chamber body beneath the lid; a collimator disposed in the processing region; a power source coupled to the collimator; and a first set of magnets disposed around the chamber body above the collimator and a second set of magnets disposed around the chamber body and below the collimator that together create a guidance magnetic field that is substantially orthogonal to the collimator. |
申请公布号 |
SG11201609400X(A) |
申请公布日期 |
2016.12.29 |
申请号 |
SGX11201609400 |
申请日期 |
2015.05.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
TANG, XIANMIN;LEE, JOUNG JOO;LIU, GUOJUN |
分类号 |
H01L21/02;H01L21/203 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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