| 摘要 |
PURPOSE:To test a function by an optical signal by mounting an optical fiber probe onto a probe card in addition to a metallic probe. CONSTITUTION:A plurality of probes 1 consisting of a metal such as tungsten are supported or a resin C, and connected to a wiring B. The tips of each probe are arranged on approximately one plane so as to be brought into contact simultaneously on a semiconductor wafer to be tested. An optical probe 2 with an optical fiber 4 is mounted in addition to these probes. The tip of the probe 2 is fixed in approximately parallel with or vertically to a wafer in response to the structure of an optical semiconductor element on the wafer. Accordingly, a function can be tested by optical signals in addition to a test by conventional electrical signals. |
