| 摘要 |
PURPOSE:To form efficiently a groove, etc. on the surface to be worked with one unit of laser oscillator by splitting a beam of laser light into plural beams at prescribed intervals and irradiating simultaneously the split beams to the surface to be worked. CONSTITUTION:The laser light emitted from a laser oscillator 1 is split in a splitter 4 to plural beams of laser light 20-20'' via a collimater 2 and a mirror 3. The split laser light 20-20'' arrive at an irradiating device 22 constituted into an array via a half mirror 5 and are irradiated to a surface 11 to be worked from the diagonal directions (20-70 deg.) at prescribed intervals, thus forming groove or worked parts. On the other hand, the light from a light source 14 is irradiated through half mirrors 15, 5, a mirror 6 and a working lens 7 to the surface 11 and the light reflected therefrom is inputted through the same optical path into a CCD camera 16, by which the positional information thereof is inputted to a microcomputer 17. Said information is compared with the information inputted preliminarily to a memory 18 and the quantity thereof is controlled by operating an X-Y control system 9 and the irradiating means 22 provided with a working lens 7, by which the position and operating speed thereof are controlled. |
