| 摘要 |
PURPOSE:To make an apparatus compact and light weight, by coupling a piston, which can adjust pressure, to the lower end of a piston rod in a hollow slider having a measuring piece, which is provided in a structural body so that it is freely moved up and down, and attaching the upper end thereof to the structural body, so that it can be moved in the intersecting direction with the axial direction and can be turned. CONSTITUTION:A Z axis slider 6 having a measuring piece 5 at the lower end is provided in an X axis slider 4 so that it can be freely moved up and down. A piston 21 is coupled to the lower end of a piston rod 23, which is arranged in a cylinder 19 of a cylinder device 17 that is inserted in a hollow hole 12 of the slider 6, so that the piston can be turned. A moving body 26, which is linked to the upper end thereof so that it can be turned, is mounted on a bracket 24 of the slider 4 so that the body 26 can be moved in the horizontal direction. The fluctuation in pressure, which is applied to the piston 21 accompanied by the up and down movement of the slider 6, is controlled by a pressure adjusting means 35 within a specified pressure. Thus the weight of the slider 6 can be balanced by the air pressure of the device 17. Therefore the weight is made light. Since the device 17 is provided in the hole 12, the apparatus can be made compact. |
