发明名称 OHMIC CONTACT TO P-TYPE INP OR INGAASP
摘要 An ohmic contact to a semiconductor device comprising p-type InP is formed by sequentially depositing beryllium-gold and gold layers on InP and then heat-treating the device at a temperature less than 440 degrees C. An ohmic contact to p-type InGaAsP can be similarly formed.
申请公布号 DE3071336(D1) 申请公布日期 1986.02.20
申请号 DE19803071336 申请日期 1980.08.22
申请人 WESTERN ELECTRIC COMPANY, INCORPORATED 发明人 KERAMIDAS, VASSILIS GEORGE;MCCOY, ROBERT JACKSON;TEMKIN, HENRYK
分类号 H01L33/00;H01L21/28;H01L21/285;H01L29/43;H01L29/45;H01S5/00;H01S5/042;(IPC1-7):H01L23/48;H01L29/40;H01L29/54 主分类号 H01L33/00
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