| 摘要 |
PURPOSE:To make it possible to detect the central axes of a material to be examined and a probe accurately and quickly, by arranging an interference optical system between the material to be examined and the probe, and detecting the central axes of the material to be examined and the probe by said interference optical system. CONSTITUTION:A beam splitter 7, lenses 8 and 9, a laser light source 10, reflecting mirrors 11 and 12, a beam splitter 13 and a sensor 14 are arranged between a lens to be examined 1 and a probe 3, and an interference optical system is formed. Light from the laser light 10 is split by the beam splitter 7 through the reflecting mirror 11. One beam is reflected by the reflecting mirror 12 by way of the beam splitter 7 and again inputted to the beam splitter 7. The beam passes the lens 8 and the focal point is formed on a surface 1a of the lens to be examined 1. At this time, the center of the interference fringes of the light, which is focused on the surface 1a, and reference light is the central axis of the lens to be examined 1. The center of the interference fringes of the light, which is focused at a tip part 3a, and the reference light is the central axis of the probe 3. By this method, the central axes of the material to be examined and the probe can be detected accurately and quickly. |
