Semiconductor processing system.

摘要

A wafer processing system includes an autoloader mounted within a load lock (7) for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber (6) and cassette load and unload positions within the load lock. The autoloader includes an indexer system (66) which includes a two-cassette capacity unloading indexer, a two-cassette capacity loading indexer, a shuttle or wafer transfer mechanism (70), a flat finding mechanism and a four axis wafer transfer robot (60). The system provides rapid, contamination-free loading and unloading of semiconductor wafers.