Method of coating a molybdenum surface.

摘要

Disclosed is a method of treating a molybdenum surface to render it smooth and preserve its hardness. The treatment consists of subjecting the surface to a nitridation step by which an layer of molybdenum layer is first formed, followed by depositon of a silicon nitride layer thereon. The nitridation step may be accomplished in a plasma deposition system using either forming gas, ammonia or gas mixture of nitrogen and ammonia at a predetermined low temperature and pressure. The silicon nitride deposition may be accomplished in the same system at the same temperature and pressure. The silicon nitride deposition may be accomplished in the same system at the same temperature and pressure by substituting the gas utilized to form the molybdenum nitride with a gaseous mixture of silane and one of nitrogen and ammonia.

The method is applied to molybdenum masks used for screening a metallized paste pattern on a substrate, thereby extending the useful masklife.