发明名称 Device for producing epitaxial growth from a liquid phase
摘要 The device for producing epitaxial growth from a liquid phase with a boat (1), which contains a crystalline melt (8) corresponding to the epitaxial layer to be produced on a substrate (9) and is introduced into an oven, containing a quartz tube, for producing the growth layer, is characterised according to the invention in that the boat (1) is provided with a cover (16) which prevents evaporation and/or spillage of the melt (8) during the movement of the boat (1) but, on the other hand, clears the interior (2) of the boat, in order to allow a reduction of the melt (8) by means of hydrogen before the onset of the epitaxial growth. <IMAGE>
申请公布号 DE3617333(A1) 申请公布日期 1986.11.27
申请号 DE19863617333 申请日期 1986.05.23
申请人 MITSUBISHI DENKI K.K. 发明人 ODA,TAKAO;YOSHIDA,SUSUMU
分类号 H01L21/208;C30B19/06;(IPC1-7):C30B19/06 主分类号 H01L21/208
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