摘要 |
The device for producing epitaxial growth from a liquid phase with a boat (1), which contains a crystalline melt (8) corresponding to the epitaxial layer to be produced on a substrate (9) and is introduced into an oven, containing a quartz tube, for producing the growth layer, is characterised according to the invention in that the boat (1) is provided with a cover (16) which prevents evaporation and/or spillage of the melt (8) during the movement of the boat (1) but, on the other hand, clears the interior (2) of the boat, in order to allow a reduction of the melt (8) by means of hydrogen before the onset of the epitaxial growth. <IMAGE>
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