发明名称 PRESSURE SENSOR, TACTILE SENSOR, AND METHOD FOR MANUFACTURING PRESSURE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a small pressure sensor capable of detecting pressure in a plurality of directions.SOLUTION: A pressure sensor 1 comprises: a cantilever 10 in which a plate-like first lever part 11 and a second lever part 13 which bends in a direction (vertical direction) different from the first lever part 11 are linked; a first pressure sensitive element 20 provided in the first lever part 11; a second pressure sensitive element 30 provided in the second lever part 13; and a detecting unit 40 which detects an amount of pressure change of the first pressure sensitive element 20 and an amount of pressure change of the second pressure sensitive element 30.SELECTED DRAWING: Figure 1
申请公布号 JP2016170121(A) 申请公布日期 2016.09.23
申请号 JP20150051279 申请日期 2015.03.13
申请人 SEIKO INSTRUMENTS INC;UNIV OF TOKYO 发明人 TAKAHASHI HIDETOSHI;MATSUMOTO KIYOSHI;SHIMOYAMA ISAO;KAIHO KATSUTAKA
分类号 G01L5/16;H01L41/113 主分类号 G01L5/16
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