| 发明名称 |
STRIPPING COMPOSITIONS AND METHODS OF STRIPPING RESISTS |
| 摘要 |
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a dialkyl sulfone compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions. |
| 申请公布号 |
DE3369746(D1) |
申请公布日期 |
1987.03.12 |
| 申请号 |
DE19833369746 |
申请日期 |
1983.09.02 |
| 申请人 |
J.T. BAKER CHEMICAL CO. |
发明人 |
WARD, IRL EUGENE, JR.;HALLQUIST, LISA GAIL;HURLEY, THOMAS JOSEPH |
| 分类号 |
C23F1/44;G03F7/42;(IPC1-7):G03F7/26;C11D7/50 |
主分类号 |
C23F1/44 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
