| 摘要 |
PURPOSE:To form the titled device so that it is excellent in its durability and vibration resistance, can be easily adjusted, has a high light utilization efficiency, can execute a scan precisely, and can be made small in size, by setting light refractive indexes of a substrate and its adjacent layer of the part corresponding to an energy applied part, respectively, to each different state, and on the other hand, setting other light refractive indexes to each equal state. CONSTITUTION:A semiconductor laser 17 is driven, a laser beam 14' is emitted into an optical waveguide layer 11, converted to parallel rays 14 by a waveguide lens 16, and the rays 14 advance in the arranging direction of diffraction gratings G1-Gn in a waveguide mode in the optical waveguide layer 11. To electric heating bodies H1-Hn, a current from a heating power source 22 is allowed to flow through a driver 15, and the current is supplied by selecting successively the electric heating bodies H1-Hn one by one. A substrate 10 of a part which has contacted the heated electric heating body is heated, its light refractive index falls, and when the optical waveguide layer 11 becomes an asymmetrical waveguide, the light is emitted from the optical waveguide layer 11 to an adjacent layer 12 side, in this part, and emitted to the outside of the adjacent layer 12 by a diffracting action of the diffraction gratings G1-Gn. A body to be scanned 18 is scanned in the direction X by this emitted light 14. |
