| 摘要 |
PURPOSE:To store and analyze data by digitizing and storing a measured value. CONSTITUTION:A turntable 1 is rotated by a turntable rotary driving part 2 and its one-turn angle is divided equally by an encoder 3 to generate a rotational angle signal (a). Then an optical system 8 is fixed to a stage 4, which is removed by a stage driving part 5 in a radial direction of the table 1. Further, a position detector 6 detects the distance from the center of the table 1 to the stage 4 and generates a position signal (b). A laser 7 emits a laser beam (c), which is split into two by the optical system 8. One beam is guided to and reflected by a body to be measured on the table 1 to become a reflected beam (e) and the other beam becomes an incident beam (d) for detecting the quantity of the beam (c), so that those beams are supplied to photodetectors 9 and 10, thereby generating incidence and reflection signals (f) and (g). The reflection factor signal (h) generated by dividing 11 the signal (g) by the signal (f) is A/D-converted 12 and stored 13 and the measurement result is displayed out 16.
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