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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPH01208834(A)
申请公布日期
1989.08.22
申请号
JP19880032930
申请日期
1988.02.17
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
NAKAMURA NOBUO;NAKAGAWA KIYOKAZU;KURE TOKUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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地址
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