发明名称 |
Scanning mechanism and scanning probe microscope |
摘要 |
A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane. |
申请公布号 |
US9519005(B2) |
申请公布日期 |
2016.12.13 |
申请号 |
US201514862538 |
申请日期 |
2015.09.23 |
申请人 |
OLYMPUS CORPORATION |
发明人 |
Sakai Nobuaki |
分类号 |
G01Q10/00;G01Q20/02;G01Q10/04;G01Q30/02 |
主分类号 |
G01Q10/00 |
代理机构 |
Scully, Scott, Murphy & Presser, P.C. |
代理人 |
Scully, Scott, Murphy & Presser, P.C. |
主权项 |
1. A scanning mechanism comprising:
a cantilever; an XY movable stage movable in X and Y directions parallel to an X-Y plane; an XY actuator to scan the XY movable stage in the X and Y directions; a Z actuator, held by the XY movable stage, to scan the cantilever in a Z direction perpendicular to the X-Y plane, the Z actuator having one end fixed to the XY movable stage and the other end, which is a free end, to hold a holder configured to hold the cantilever; and a light condensing optical unit comprising at least one lens, the at least one lens being held by the XY movable stage, the Z actuator not being operable to move the at least one lens in the Z direction, and the at least one lens directing light to the cantilever for detecting a displacement of the cantilever, wherein in projection to the X-Y plane, at least part of the Z actuator is not overlapped with the light condensing optical unit. |
地址 |
Tokyo JP |