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发明名称
A METHOD OF FORMING RECESSED OXIDE ISOLATION WITH REDUCED STEEPNESS OF THE BIRDS' NECK
摘要
申请公布号
EP0215218(B1)
申请公布日期
1990.06.20
申请号
EP19860109127
申请日期
1986.07.04
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CHRISTIE, ROSEMARY;HWANG, BAO-TAI;KU, SAN-MEI;SICKLER, JANET MARION
分类号
H01L21/76;H01L21/306;H01L21/308;H01L21/316;H01L21/762
主分类号
H01L21/76
代理机构
代理人
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地址
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